Lehrstuhl für Elektronische Bauelemente

Platinum contamination issues in ferroelectric memories (2002) Boubekeur H, Mikolajick T, Pamler W, Höpfner J, Frey L, Ryssel H Journal article, Original article Erlanger Berichte Mikroelektronik (2002) Frey L, Ryssel H Edited Volume Plasma induced damage monitoring for HDP processes (2002) Beyer A, Hausmann A, Junack M, Radecker J, Ruf A, Dirnecker T Conference contribution Effect of barium contamination on gate oxide integrity in high-k dram (2002) Boubekeur H, Mikolajick T, Bauer A, Frey L, Ryssel H Journal article, Original article High-resolution constant-height imaging with apertured silicon cantilever probes (2001) Dziomba T, Danzebrink H, Lehrer C, Frey L, Sulzbach T, Ohlsson O Journal article, Original article Fabrication of silicon aperture probes for scanning near-field optical microscopy by focused ion beam nano machining (2001) Lehrer C, Frey L, Petersen S, Sulzbach T, Ohlsson O, Dziomba T, Danzebrink H, Ryssel H Journal article, Original article Limitations of focused ion beam nanomachining (2001) Lehrer C, Frey L, Petersen S, Ryssel H Journal article, Original article Electrical reliability aspects of through the gate implanted MOS structures with thin oxides (2001) Jank MPM, Lemberger M, Bauer A, Frey L, Ryssel H Journal article, Original article Impact of platinum contamination on ferroelectric memories (2001) Boubekeur H, Mikolajick T, Nagel N, Dehm C, Pamler W, Bauer A, Frey L, Ryssel H Conference contribution, Conference Contribution Substrate misorientation as additional parameter for low temperature growth of GaAs (2001) Schür C, Marek T, Strunk HP, Tautz S, Steen C, Kiesel P, Malzer S, et al. Journal article