Lehrstuhl für Elektronische Bauelemente

Ion beam-treated silicon probes operated in transmission and cross-polarized reflection mode near-infrared scanning near-field optical microscopy (NIR-SNOM) (1999) Dziomba T, Sulzbach T, Ohlsson O, Lehrer C, Frey L, Danzebrink H Journal article, Original article Microprobe analysis of Pt films deposited by beam induced reaction (1998) Park Y, Takai M, Lehrer C, Frey L, Ryssel H Journal article, Original article Microanalysis of masklessly fabricated micro structures using nuclear microprobe (1998) Park Y, Takai M, Nagai T, Kishimoto T, Seidl A, Lehrer C, Frey L, Ryssel H Journal article, Original article Distortion of sims profiles due to ion beam mixing: Shallow arsenic implants in silicon (1998) Montandon C, Bourenkov A, Frey L, Pichler P, Biersack JP Journal article, Original article Synthesis of SiC by high temperature C+ implantation into SiO2: The role of Si/SiO2 interface (1997) Frey L, Stoemenos J, Schork R, Nejim A, Hemment P Journal article, Original article New method based on atomic force microscopy for in-depth characterization of damage in Si irraadiate with 209 MeV Kr (1997) Biró L, Gyulai J, Havancsák K, Didyk A, Bogen S, Frey L, Ryssel H Journal article, Original article Microanalysis of impurity contamination in masklessly etched area using focused ion beam (1997) Park Y, Takai M, Nagai T, Kishimoto T, Lehrer C, Frey L, Ryssel H Journal article, Original article Measurement of shallow arsenic impurity profiles in semiconductor silicon using time-of-flight secondary ion mass spectrometry and total reflection X-ray fluorescence spectrometry (1997) Schwenke H, Knoth J, Fabry L, Pahlke S, Scholz R, Frey L Journal article, Original article In-depth damage distribution by scanning probe methods in targets irradiated with 200 MeV ions (1997) Biró L, Gyulai J, Havancsák K, Didyk A, Frey L, Ryssel H Journal article, Original article Distortion of sims profiles due to ion beam mixing (1997) Saggio M, Montandon C, Bourenkov A, Frey L, Pichler P Journal article, Original article