Lehrstuhl für Fertigungsmesstechnik (FMT)

New applications of the Nanomeasuring Machine (NPM-Machine) by novel optical and tactile probes with subnanometer repeatability (2006) Jäger G, Manske E, Hausotte T Journal article Nanometrology - Nanopositioning- and nanomeasuring machine with integrated nanoprobes (2006) Jäger G, Hausotte T, Manske E, Büchner HJ, Mastylo R, Vorbringer-Dorozhovets N, Füßl R, Grünwald R Conference contribution Progress on the wide scale nano-positioning-and nanomeasuring machine by integration of optical-nanoprobes (2006) Jäger G, Hausotte T, Manske E, Büchner HJ, Mastylo R, Vorbringer-Dorozhovets N, Füßl R, Grünwald R Conference contribution, Conference Contribution Development of the interferometrical scanning probe microscope - art. no. 629311 (2006) Vorbringer-Dorozhovets N, Hausotte T, Hofmann N, Manske E, Jäger G Conference contribution Nanomeasuring and nanopositioning engineering (2006) Jäger G, Hausotte T, Manske E, Büchner HJ, Mastylo R, Vorbringer-Dorozhovets N, Hofmann N Conference contribution Metrological scanning probe microscope - art. no. 61880L (2006) Vorbringer-Dorozhovets N, Hausotte T, Manske E, Jäger G, Hofmann N Conference contribution Long-range nanopositioning and nanomeasuring machine for application to micro- and nanotechnology (2006) Jäger G, Hausotte T, Büchner HJ, Manske E, Schmidt I, Mastylo R Conference contribution A new traceable method for determination of periodic nonlinearities of interferometers - art. no. 629206 (2006) Schmidt I, Jäger G, Hausotte T, Manske E, Füßl R Conference contribution Integration of probe systems in a nanopositioning and nanomeasuring machine (2005) Jäger G, Manske E, Hausotte T, Mastylo R, Büchner HJ, Grünwald R, Füßl R Conference contribution Measurements with an atomic force microscope using a long travel nanopositioning and nanomeasuring machine (2004) Hofmann N, Hausotte T, Jäger G, Manske E Conference contribution