Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie (IISB)

Research facility


Location: Erlangen, Germany (DE) DE

ISNI: 0000000104810543

ROR: https://ror.org/04q5rka56

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Types of publications

Journal article
Book chapter / Article in edited volumes
Authored book
Translation
Thesis
Edited Volume
Conference contribution
Other publication type
Unpublished / Preprint

Publication year

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Abstract

Journal

Thin HfxTiySixO films with varying Hf to Ti contents as candidates for high-k dielectrics (2005) Bauer A, Paskaleva A, Lemberger M, Frey L, Ryssel H Conference contribution, Conference Contribution High-k Hafnium Silicate Films on Silicon and Germanium Wafers by MOCVD Using a Single-Source Precursor (2005) Lemberger M, Schön F, Dirnecker T, Jank M, Paskaleva A, Bauer A, Frey L, Ryssel H Book chapter / Article in edited volumes Ion Sputtering at Grazing Incidence for SIMS-Analysis (2005) Ryssel H, Ullrich M, Burenkov A Journal article Implantation and Annealing of Aluminum in 4H Silicon Carbide (2005) Rambach M, Schmid F, Krieger M, Frey L, Bauer A, Pensl G, Ryssel H Journal article Investigations into the wear of a WL10 ion source (2005) Haeublein V, Sadrawetz S, Frey L, Martinz HP, Ryssel H Journal article, Original article Electrical properties of hafnium silicate films obtained from a single-source MOCVD precursor (2005) Lemberger M, Paskaleva A, Zürcher S, Bauer A, Frey L, Ryssel H Journal article, Original article Chemical vapor phase precipitation of new materials for sub 50 nm transistors Chemische Dampfphasenabscheidung von neuen Materialien für Sub-50-nm-Transistoren (2005) Frey L, Bauer A, Ryssel H Journal article, Original article Characterization of interface state densitiesby photocurrent analysis: Comparison of results for different insulator layers (2005) Rommel M, Groß M, Ettinger A, Lemberger M, Bauer A, Frey L, Ryssel H Journal article, Original article Music Genre Estimation from Low Level Audio Features (2004) Hellmuth O, Allamanche E, Herre J, Kastner T, Wistorf R, Lefebvre N Conference contribution, Original article Electrical characterization and reliability aspects of zirconium silicate films obtained from novel MOCVD precursors (2004) Lemberger M, Paskaleva A, Zürcher S, Bauer A, Frey L, Ryssel H Journal article, Original article
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