Lam Research

Industry / private company


Location: Fremont, CA

ISNI: 0000000404064271

ROR: https://ror.org/04gecbm52

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Types of publications

Journal article
Book chapter / Article in edited volumes
Authored book
Translation
Thesis
Edited Volume
Conference contribution
Other publication type
Unpublished / Preprint

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Abstract

Journal

Atomic layer deposition of phosphorus oxide films as solid sources for doping of semiconductor structures (2018) Kalkofen B, Ahmed B, Beljakowa S, Lisker M, Kim YS, Burte EP Conference contribution