Prof. Dr. Lothar Frey

Lehrstuhl für Elektronische Bauelemente

Effective work function tuning in high-κ dielectric metal-oxide-semiconductor stacks by fluorine and lanthanide doping (2010) Fet A, Haeublein V, Bauer AJ, Ryssel H, Frey L Journal article The Impact of Helium Co-Implantation on Hydrogen Induced Donor Profiles in Float Zone Silicon (2010) Laven J, Job R, Schulze HJ, Niedernostheide FJ, Häublein V, Schulze H, Schustereder W, et al. Journal article Modeling of the effective work function instability in metal/high-κ dielectric stacks (2010) Fet A, Haeublein V, Bauer AJ, Ryssel H, Frey L Journal article Full wafer microlens replication by UV imprint lithography (2010) Schmitt H, Rommel M, Bauer A, Frey L, Bich A, Eisner M, Voelkel R, Hornung M Journal article NMOS logic circuits using 4H-SiC MOSFETs for high temperature applications (2010) Le-Huu M, Schrey F, Grieb M, Schmitt H, Haeublein V, Bauer A, Ryssel H, Frey L Authored book, Volume of book series Honeycomb voids due to ion implantation in germanium (2010) Kaiser RJ, Koffel S, Pichler P, Bauer AJ, Amon B, Claverie A, Benassayag G, et al. Journal article, Original article Future challenges in CMOS process modeling (2010) Pichler P, Burenkov A, Lorenz J, Kampen C, Frey L Journal article, Original article Reduced on resistance in LDMOS devices by integrating trench gates into planar technology (2010) Erlbacher T, Bauer AJ, Frey L Journal article, Original article Influence of FIB patterning strategies on the shape of 3D structures: Comparison of experiments with simulations (2010) Rommel M, Jambreck JD, Ebm C, Platzgummer E, Bauer AJ, Frey L Journal article, Original article Influence of annealing temperature and measurement ambient on TFTs based on gas phase synthesized ZnO nanoparticles (2010) Walther S, Schäfer S, Jank MPM, Thiem H, Peukert W, Frey L, Ryssel H Journal article, Original article