Prof. Dr. Lothar Frey

Lehrstuhl für Elektronische Bauelemente

Fabrication of metallic SPM tips by combining UV nanoimprint lithography and focused ion beam processing (2010) Jambreck JD, Schmitt H, Amon B, Rommel M, Bauer AJ, Frey L Journal article, Original article Evaluation of NbN thin films grown by MOCVD and plasma-enhanced ALD for gate electrode application in high-k/SiO2 gate stacks (2010) Hinz J, Bauer AJ, Thiede T, Fischer RA, Frey L Journal article, Original article Comprehensive study of focused ion beam induced lateral damage in silicon by scanning probe microscopy techniques (2010) Rommel M, Spoldi G, Yanev V, Beuer S, Amon B, Jambreck J, Petersen S, et al. Journal article, Original article Lanthanum implantation for threshold voltage control in metal/high-k devices (2009) Fet A, Haeublein V, Bauer AJ, Ryssel H, Frey L Journal article, Original article Comparative study between conventional macroscopic IV techniques and advanced AFM based methods for electrical characterization of dielectrics at the nanoscale (2009) Yanev V, Erlbacher T, Rommel M, Bauer AJ, Frey L Journal article, Original article Improved manufacturability of ZrO2 MIM capacitors by process stabilizing HfO2 addition (2009) Mueller J, Boescke TS, Schroeder U, Reinicke M, Oberbeck L, Zhou D, Weinreich W, et al. Journal article, Original article Self-aligned growth of organometallic layers for nonvolatile memories: Comparison of liquid-phase and vapor-phase deposition (2008) Erlbacher T, Jank MPM, Ryssel H, Frey L, Engl R, Walter A, Sezi R, Dehm C Journal article UV nanoimprint materials: Surface energies, residual layers, and imprint quality (2007) Schmitt H, Frey L, Ryssel H, Rommel M, Lehrer C Journal article MOCVD of Hafnium Silicate Films Obtained from a Single-Source Precusor on Silicon and Germanium for Gate-Dielectric Applications (2007) Lemberger M, Schön F, Dirnecker T, Jank M, Frey L, Ryssel H, Paskaleva A, et al. Journal article Impurity Conduction in Silicon Carbide (2007) Krieger M, Semmelroth K, Weber HB, Pensl G, Rambach M, Frey L Journal article