Prof. Dr. Lothar Frey

Lehrstuhl für Elektronische Bauelemente

Nanoscale morphology and photoemission of arsenic implanted germanium films (2006) Peto G, Khanh N, Horvath Z, Molnar G, Gyulai J, Kotai E, Guczi L, Frey L Journal article The impact of mass resolution on molybdenum contamination for B, P, BF 2, and As implantations (2006) Häublein V, Frey L, Ryssel H Conference contribution, Conference Contribution Simulation of ion beam direct structuring for 3D nanoimprint template fabrication (2006) Lugstein A, Frey L, Bertagnolli E, Platzgummer E, Biedermann A, Langfischer H, Eder-Kapl S, et al. Journal article, Original article Ion implantation and annealing for an efficient N-doping of TiO2 nanotubes (2006) Ghicov A, Macák J, Tsuchiya H, Kunze J, Häublein V, Frey L, Schmuki P Journal article, Original article Extracting activation and compensation ratio from aluminum implanted 4H-SiC by modeling of resistivity measurements (2006) Rambach M, Frey L, Bauer A, Ryssel H Authored book, Volume of book series Well Design in a Bulk CMOS Technology with Low Mask Count (2006) Jank M, Kandziora C, Frey L, Ryssel H Conference contribution Wafer scale characterization of interface state densities without test structures by photocurrent analysis (2005) Rommel M, Groß M, Frey L, Bauer A, Ryssel H Conference contribution, Conference Contribution Triple trench gate IGBTs (2005) Berberich SE, Bauer A, Frey L, Ryssel H Conference contribution, Conference Contribution Thin HfxTiySixO films with varying Hf to Ti contents as candidates for high-k dielectrics (2005) Bauer A, Paskaleva A, Lemberger M, Frey L, Ryssel H Conference contribution, Conference Contribution High-k Hafnium Silicate Films on Silicon and Germanium Wafers by MOCVD Using a Single-Source Precursor (2005) Lemberger M, Schön F, Dirnecker T, Jank M, Paskaleva A, Bauer A, Frey L, Ryssel H Book chapter / Article in edited volumes