Prof. Dr. Lothar Frey

Lehrstuhl für Elektronische Bauelemente

Annealing of Aluminium Implanted 4H-SiC: Comparison of Furnace and Lamp Annealing (2005) Rambach M, Bauer A, Frey L, Friedrichs P, Ryssel H Journal article Implantation and Annealing of Aluminum in 4H Silicon Carbide (2005) Rambach M, Schmid F, Krieger M, Frey L, Bauer A, Pensl G, Ryssel H Journal article Investigations into the wear of a WL10 ion source (2005) Haeublein V, Sadrawetz S, Frey L, Martinz HP, Ryssel H Journal article, Original article Electrical properties of hafnium silicate films obtained from a single-source MOCVD precursor (2005) Lemberger M, Paskaleva A, Zürcher S, Bauer A, Frey L, Ryssel H Journal article, Original article Chemical vapor phase precipitation of new materials for sub 50 nm transistors Chemische Dampfphasenabscheidung von neuen Materialien für Sub-50-nm-Transistoren (2005) Frey L, Bauer A, Ryssel H Journal article, Original article Characterization of interface state densitiesby photocurrent analysis: Comparison of results for different insulator layers (2005) Rommel M, Groß M, Ettinger A, Lemberger M, Bauer A, Frey L, Ryssel H Journal article, Original article Additional peaks in mass spectra due to charge exchange events and dissociation of molecular ions during extraction (2005) Häublein V, Frey L, Ryssel H Journal article, Original article Design, fabrication and characterization of a microactuator for nebulization of fluids (2004) Yasenov NN, Berberich SE, Frey L, Ryssel H Conference contribution Electrical characterization and reliability aspects of zirconium silicate films obtained from novel MOCVD precursors (2004) Lemberger M, Paskaleva A, Zürcher S, Bauer A, Frey L, Ryssel H Journal article, Original article Integration of field emitters into scanning probe microscopy sensors using focused ion and electron beams (2004) Lehrer C, Frey L, Petersen S, Ryssel H, Schäfer M, Sulzbach T Journal article, Original article