Prof. Dr. Lothar Frey

Lehrstuhl für Elektronische Bauelemente

Modeling of the influence of Schottky barrier inhomogeneities on SiC diode characteristics (2004) Weiss R, Frey L, Ryssel H Authored book, Volume of book series Investigation of rapid thermal annealed pn-junctions in SiC (2004) Frey L, Rambach M, Weiss R, Bauer A, Ryssel H Authored book, Volume of book series Trench sidewall doping for lateral power devices (2003) Berberich SE, Bauer A, Frey L, Ryssel H Conference contribution, Conference Contribution Influence of Antenna Shape and Resist Patterns on Charging Damage During Ion Implantation (2003) Dirnecker T, Frey L, Bauer A, Ryssel H, Ruf A, Henke D, Beyer A Conference contribution Electrical Characterization of Zirconium Silicate Films Obtained from Novel MOCVD Precursors (2003) Paskaleva A, Lemberger M, Zürcher S, Bauer A, Frey L, Ryssel H Conference contribution Surface Properties and Electrical Characteristics of Rapid Thermal Annealed 4H-SiC (2003) Bauer A, Rambach M, Frey L, Weiss R, Rupp R, Friedrichs P, Schörner R, Peters DP Authored book, Volume of book series Nanoscale effects in focused ion beam processing (2003) Frey L, Lehrer C, Ryssel H Journal article, Review article Materials processing by focused ion beams for TEM sample preparation and nanostructuring Materialbearbeitung mittels fokussierter ionenstrahlen zur TEM-probenpräparation und nanostrukturierung (2003) Frey L, Lehrer C Journal article, Original article Development of enhanced depth-resolution technique for shallow dopant profiles (2002) Fujita M, Tajima J, Nakagawa T, Abo S, Kinomura A, Pászti F, Takai M, et al. Journal article, Original article MOCVD of titanium dioxide on the basis of new precursors (2002) Leistner T, Lehmbacher K, Härter P, Schmidt C, Bauer A, Frey L, Ryssel H Journal article, Original article