Prof. Dr. Lothar Frey

Lehrstuhl für Elektronische Bauelemente

Contamination control and ultrasensitive chemical analysis (1993) Ryssel H, Frey L, Streckfuss N, Schork R, Kroninger F, Falter T Journal article, Original article Application of advanced contamination analysis for qualification of wafer handling systems and chucks (1993) Kroninger F, Streckfuss N, Frey L, Falter T, Ryzlewicz C, Pfitzner L, Ryssel H Journal article, Original article A novel delineation technique for 2D-profiling of dopants in crystalline silicon (1993) Gong L, Frey L, Bogen S, Ryssel H Journal article, Original article Analysis of microstructured samples by focused ion beam sample preparation (1993) Frey L, Ergele W, Falter T, Gong L, Ryssel H Journal article, Original article High energy ion implantation for semiconductor application at Fraunhofer-AIS, Erlangen (1992) Frey L, Bogen S, Gong L, Jung W, Ryssel H, Gyulai J Journal article, Original article End-of-range disorder influenced by inherent oxygen in silicon (1992) Antos L, Gyulai J, Khanh N, Frey L Journal article, Original article Characterization of metal impurities in silicon-on-insulator material (1992) Frey L, Kroninger F, Streckfusse N, Ryssel H, Margail J Journal article, Original article Analysis of trace metals on silicon surfaces (1992) Streckfusse N, Frey L, Zielonka G, Kroninger F, Ryzlewicz C, Ryssel H Journal article, Original article Simulation of high energy implantation profiles in crystalline silicon (1992) Gong L, Bogen S, Frey L, Jung W, Ryssel H Journal article, other Tribological properties of carbonized photoresist (1991) Oechsner R, Kluge A, Frey L, Ryssel H Journal article, Original article