Long-range nanopositioning and nanomeasuring machine for application to micro- and nanotechnology
Jäger G, Hausotte T, Büchner HJ, Manske E, Schmidt I, Mastylo R (2006)
Publication Status: Published
Publication Type: Conference contribution
Publication year: 2006
Journal
Publisher: International Society for Optical Engineering; 1999
Book Volume: 6152
Pages Range: 15224-15224
DOI: 10.1117/12.655156
Abstract
The integration of several, optical and tactile probe systems and nanotools makes the NPM-Machine suitable for various tasks, such as large-area scanning probe microscopy, mask and wafer inspection, nanostructuring, biotechnology and genetic engineering as well as measuring mechanical precision workpieces, precision treatment and for engineering new material. Various developed probe systems have been integrated into the NPM-Machine. The measurement results of a focus sensor, metrological AFM, white light sensor, tactile stylus probe and of a 3D-micro-touch-probe are presented. Single beam-, double beam- and triple beam interferometers built in the NPM-Machine for six degrees of freedom measurements are described.
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Germany (DE)How to cite
APA:
Jäger, G., Hausotte, T., Büchner, H.-J., Manske, E., Schmidt, I., & Mastylo, R. (2006). Long-range nanopositioning and nanomeasuring machine for application to micro- and nanotechnology. (pp. 15224-15224). International Society for Optical Engineering; 1999.
MLA:
Jäger, Gerd, et al. "Long-range nanopositioning and nanomeasuring machine for application to micro- and nanotechnology." International Society for Optical Engineering; 1999, 2006. 15224-15224.
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