A highly sensitive evaluation method for the determination of different current conduction mechanisms through dielectric layers

Murakami K, Rommel M, Yanev V, Erlbacher T, Bauer AJ, Frey L (2011)

Publication Status: Published

Publication Type: Journal article, Original article

Publication year: 2011

Journal

Journal of Applied Physics AIP Publishing

Publisher: American Institute of Physics Inc.

Book Volume: 110

Article Number: 054104

Journal Issue: 5

DOI: 10.1063/1.3631088

Authors with CRIS profile

Lothar Frey Lehrstuhl für Elektronische Bauelemente

Involved external institutions

Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie (IISB) DE Germany (DE)

How to cite

APA:

Murakami, K., Rommel, M., Yanev, V., Erlbacher, T., Bauer, A.J., & Frey, L. (2011). A highly sensitive evaluation method for the determination of different current conduction mechanisms through dielectric layers. Journal of Applied Physics, 110(5). https://doi.org/10.1063/1.3631088

MLA:

Murakami, Katsuhisa, et al. "A highly sensitive evaluation method for the determination of different current conduction mechanisms through dielectric layers." Journal of Applied Physics 110.5 (2011).

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