A high-precision silicon-on-insulator position sensor

Beck P, Wynne LC, Iadanza S, O’Faolain L, Schulz SA, Banzer P (2023)

Publication Type: Journal article

Publication year: 2023

Journal

APL Photonics American Institute of Physics (AIP)

Book Volume: 8

Article Number: 046113

Journal Issue: 4

DOI: 10.1063/5.0133968

Abstract

Integrated photonic devices provide significant advantages over their conventional counterparts, such as a drastically reduced footprint as well as compatibility with other photonic or electronic circuitry. In this work, we present a high-precision optical position sensor fabricated on a silicon-on-insulator platform. The sensor relies on the principle of position-dependent directional waveguide coupling upon excitation of a monolithically integrated scatterer with a tightly focused polarization-tailored beam. We demonstrate a spatial resolution of 7.2 nm, corresponding to approximately λ/200.

Involved external institutions

Max-Planck-Institut für die Physik des Lichts (MPL) / Max Planck Institute for the Science of Light

Germany (DE) University of St Andrews

United Kingdom (GB) Munster Technological University (MTU) / Ollscoil Teicneolaíochta na Mumhan

Ireland (IE)

How to cite

APA:

Beck, P., Wynne, L.C., Iadanza, S., O’Faolain, L., Schulz, S.A., & Banzer, P. (2023). A high-precision silicon-on-insulator position sensor. APL Photonics, 8(4). https://doi.org/10.1063/5.0133968

MLA:

Beck, Paul, et al. "A high-precision silicon-on-insulator position sensor." APL Photonics 8.4 (2023).

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