Specimen preparation for atom probe tomography

Felfer P, Ott B, Vorlaufer N (2024)


Publication Type: Journal article

Publication year: 2024

Journal

Book Volume: 61

Pages Range: 848-864

Journal Issue: 11

DOI: 10.1515/pm-2024-0075

Abstract

In the past 20 years or so, atom probe tomography has gone from a niche technique in physical metallurgy to a well-established method in many parts of materials science and beyond. This is owing to the improvement in both instrumentation and specimen preparation. Given the availability of instruments, successful specimen preparation is often the bottleneck in atom probe projects. In this article, the authors want to give an overview of the types of preparation techniques that are available and which challenges they pose. This includes basic electropolishing, which was dominant until the introduction of focused ion beam-based preparation some 25 years ago. Nowadays, focused ion beam-based preparation methods possibly represent the largest share, as they allow for site-specific specimen preparation, non-conductive specimens and often a higher throughput. They are continuously improved, i. e., through higher current plasma ion columns, cryo preparation for sensitive materials and room temperature liquids and 'additive' techniques for nanomaterials. This steadily increases the types of materials that can be analyzed using atom probe tomography.

Authors with CRIS profile

How to cite

APA:

Felfer, P., Ott, B., & Vorlaufer, N. (2024). Specimen preparation for atom probe tomography. Praktische Metallographie, 61(11), 848-864. https://doi.org/10.1515/pm-2024-0075

MLA:

Felfer, Peter, Benedict Ott, and Nora Vorlaufer. "Specimen preparation for atom probe tomography." Praktische Metallographie 61.11 (2024): 848-864.

BibTeX: Download