PD Dr. Andreas Erdmann

List of publications:

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Technische Fakultät
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Types of publications

Journal article
Book chapter / Article in edited volumes
Authored book
Translation
Thesis
Edited Volume
Conference contribution
Other publication type
Unpublished / Preprint

Publication year

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Abstract

Journal

Simulation study on EUV multilayer polarization effects (2021) Bilalaj L, Mesilhy HMS, Erdmann A Conference contribution Attenuated phase shift mask for extreme ultraviolet: Can they mitigate three-dimensional mask effects? (2019) Erdmann A, Evanschitzky P, Mesilhy HMS, Philipsen V, Hendrickx E, Bauer M Journal article Characterization of the scattering effect of complex mask geometries with surface roughness (2010) Pflaum C, Rahimi Z, Erdmann A Conference contribution, Conference Contribution Finite integration (FI) method for modelling optical waves in lithography masks (2009) Rahimi Z, Erdmann A, Pflaum C Conference contribution, Conference Contribution